An integrated optical chip that minimizes the size of the energy-tuning single-resonance-mode x-ray monochromator system into a $3\;{\rm{cm}} \times 5\;{\rm{cm}}$ silicon wafer is proposed. A Fabry–Perot x-ray resonator and two back-reflecting Si mirrors are employed on the wafer as the optical components, where Si(12 4 0) back reflection is used for both Fabry–Perot resonance and re-diffraction of the x-ray beams from the resonator in the incident direction. We can achieve an energy bandwidth of 3.4 meV in single-mode x rays and tune the energy by temperature variation. Such Si chips can be readily employed at the synchrotron beamlines and conventional x-ray laboratories for high-resolution investigations.

中文翻译：

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集成光学芯片，用于高分辨率，单共振模式X射线单色仪系统

一种集成的光学芯片，可将能量调谐单共振模式X射线单色仪系统的尺寸最小化为3美元； {\ rm {cm}} \乘以5 \； {\ rm {cm}} $的硅晶片被提议。晶圆上使用了一个法布里-珀罗x射线谐振器和两个背反射Si镜作为光学组件，其中Si（12 4 0）背反射用于法布里-珀罗谐振和x-射线的再衍射谐振器沿入射方向发出的射线束。我们可以在单模X射线中实现3.4 meV的能量带宽，并通过温度变化来调整能量。此类Si芯片可轻松用于同步加速器射线线和常规X射线实验室，以进行高分辨率研究。