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Simulation by COMSOL of Effects of Probe on Inductively Coupled Argon Plasma
Brazilian Journal of Physics ( IF 1.5 ) Pub Date : 2021-01-13 , DOI: 10.1007/s13538-020-00821-3
A. Shahbazian , M. K. Salem , M. Ghoranneviss

A new system is simulated to find the effects of the presence of any impurities or different devices, such as different probes along the plasma path in the torque, on plasma parameters such as electron density, electric potential, pressure, and temperature. A torque with two coils of equal size and a probe between them is simulated by the inductively coupled plasma (ICP) module in the COMSOL simulation program. Two modes are considered in the tunnel, the most important is the presence and absence of probe between the two coils. The results and measurements are compared and presented as figures and diagrams. The main outcomes reveal that the presence of any probe, even with the slightest penetration of the plasma edge, can affect the properties of the plasma. Software simulation is one of the fastest ways to get results at the least cost. In more advanced work in the future, it is possible to investigate the existence of several probes of different sizes as well as the effect of temperature fluctuations on the plasma.



中文翻译:

COMSOL模拟探针对电感耦合氩等离子体的影响

模拟了一个新系统,以发现存在任何杂质或不同设备(例如沿转矩沿等离子体路径的不同探针)对等离子体参数(如电子密度,电势,压力和温度)的影响。在COMSOL仿真程序中,通过电感耦合等离子体(ICP)模块模拟了两个相等大小的线圈和一个探针之间的转矩。隧道中考虑了两种模式,最重要的是两个线圈之间是否存在探头。比较结果和测量结果,并以图形和图表形式显示。主要结果表明,即使存在最少量的等离子体边缘,任何探针的存在也会影响等离子体的性能。软件仿真是以最低成本获得结果的最快方法之一。

更新日期:2021-01-14
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