A cost-efficient and low-complexity optical input/output (I/O) packaging solution is a substantial challenge for volume production of photonic integrated circuits. To address this, metamaterial fiber couplers are an attractive solution for integrated photonic devices especially for optical I/O, interfacing standard optical fibers to photonic chips. They offer the advantages of refractive index engineering to achieve better mode match as well as higher fabrication tolerances. Metamaterial waveguides, as a fundamental building block of these fiber couplers, have attracted tremendous attention in recent years. Here, we report on effective optical return loss control in Si metamaterial waveguide designs to achieve ultra-low reflection loss in CMOS-compatible silicon photonics implemented in a 300 mm production line. Low backscattering is a substantial consideration for a range of applications. Here, a return loss of better than ${-}{{30}}\;{\rm{dB}}$ is achieved.

中文翻译：

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在生产中的硅光子超材料光纤耦合器中控制光回波损耗

具有成本效益且低复杂度的光学输入/输出（I / O）封装解决方案对于光子集成电路的批量生产是一项重大挑战。为了解决这个问题，超材料光纤耦合器是集成光子设备（特别是光学I / O）的有吸引力的解决方案，它将标准光纤连接到光子芯片。它们具有折射率工程的优势，可以实现更好的模式匹配以及更高的制造公差。近年来，超材料波导作为这些光纤耦合器的基本组成部分，引起了极大的关注。在这里，我们报告了在硅超材料波导设计中有效的光学回波损耗控制，以实现在300毫米生产线中实现的CMOS兼容硅光子学中的超低反射损耗。低反向散射是一系列应用的重要考虑因素。在这里，回波损耗比$ {-} {{30}} \;达到{\ rm {dB}} $。