This paper presents Micro-Electro-Mechanical System (MEMS) diaphragm based piezoresistive pressure sensor for biomedical applications. A piezoresistive pressure sensor with a squared bossed diaphragm structure was developed for a low-pressure range. A trade-off between the deformation of the diaphragm and the stress induced in the piezo resistors on the diaphragm edge is analysis by using Carbon nanotubes (CNTs). CNTs are introduced in the sensor being a sensitivity material, responsible for wide range of pressure and sensitivity. The simulated results showed that the proposed structure was able to measure low pressure within range of 0–5 kPa with improved sensitivity and linearity. An 800-µm-wide 10-µm-thick square-diaphragm pressure sensor has also been designed and investigated for the different mender shape. It has been observed from the results that maximum sensitivity of 27.82 mV/kPa is achieved for 2-turn piezo resistor and the best non-linearity error − 0.27% FSS is achieved for 1-turn piezo resistor.

本文介绍了用于生物医学应用的基于微机电系统（MEMS）膜片的压阻压力传感器。具有方形凸起膜片结构的压阻压力传感器是针对低压范围开发的。通过使用碳纳米管（CNT）分析膜片的变形与膜片边缘上的压电电阻器中感应的应力之间的折衷。碳纳米管作为敏感材料引入到传感器中，负责宽范围的压力和敏感度。仿真结果表明，所提出的结构能够测量0-5 kPa范围内的低压，并具有更高的灵敏度和线性度。还设计和研究了宽度为800 µm的10 µm厚的方形膜片压力传感器，以适用于不同的修补器形状。