The purpose of this paper is to present an overview of problems and some research gaps for better understanding of piezoelectric micropump studies. Micropumps have important and diverse application areas in health and engineering applications. In recent years, researchers have carried out simulations, analytical and experimental studies to develop these technologies with different methods for the same purpose. It has been determined that piezoelectric micropumps as MEMS devices have an effective deep interest. It is worth mentioning that piezoelectric material has been considered by researchers as an attractive actuator due to its high-performance, potential cost and design convenience. This paper comprehensively reviews the studies that bring innovations in the literature of piezoelectric micropumps. Analytical characterization and modeling procedures studied by various scientists in the field of the piezoelectric actuators are also presented in detail. The analytical section will mainly focus on the studies related to the static and dynamic behaviours of circular piezoelectric actuators. Moreover, the advantages and disadvantages of the various components used to fabricate micropumps have been investigated according to the available information in the literature. Consequently, this review enables researchers a useful reference on piezoelectric micropump parameters such as modeling, flow rate, shape control, geometry, and size optimization for key engineering applications.

本文的目的是概述问题和一些研究空白，以更好地理解压电微型泵的研究。微型泵在健康和工程应用中具有重要而多样的应用领域。近年来，研究人员进行了模拟，分析和实验研究，以相同的目的用不同的方法开发这些技术。已经确定，压电微泵作为MEMS器件具有浓厚的兴趣。值得一提的是，压电材料由于其高性能，潜在成本和设计便利性而被研究人员认为是一种有吸引力的致动器。本文全面回顾了压电微泵文献中带来创新的研究。还详细介绍了在压电执行器领域由各种科学家研究的分析表征和建模程序。分析部分将主要关注与圆形压电致动器的静态和动态行为有关的研究。此外，根据文献中可获得的信息，已经研究了用于制造微型泵的各种部件的优缺点。因此，这篇综述为研究人员提供了有关压电微型泵参数的有用参考，例如建模，流速，形状控制，几何形状和尺寸优化等关键工程应用。分析部分将主要关注与圆形压电致动器的静态和动态行为有关的研究。此外，根据文献中可获得的信息，已经研究了用于制造微型泵的各种部件的优缺点。因此，这篇综述为研究人员提供了有关压电微型泵参数的有用参考，例如建模，流速，形状控制，几何形状和尺寸优化等关键工程应用。分析部分将主要关注与圆形压电致动器的静态和动态行为有关的研究。此外，根据文献中可获得的信息，已经研究了用于制造微型泵的各种部件的优缺点。因此，这篇综述为研究人员提供了有关压电微型泵参数的有用参考，例如建模，流速，形状控制，几何形状和尺寸优化等关键工程应用。