Next Generation Microshutter Array (NGMSA) is an electrostatically operated micro electro-mechanical system (MEMS) device for programmable spatial light filtering application. Original microshutter array (MSA), which is magnetically operated, was developed for the James Webb Space Telescope (JWST) NIRSpec multi-object spectrometer, and NGMSA inherited its design from the original MSA. Even though there has been incremental design changes in order to achieve stable electrostatic actuation, NGMSA operation still requires further study. Previous simulation efforts to model NGMSA’s actuation mechanics allowed to gain only general understanding of the behavior due to inadequate simulation and experimental methods. In this study, a novel electrostatic numerical simulation model is presented using COMSOL Multiphysics to accurately predict microshutter’s motion during actuation. The new model addresses all the issues that hinder realistic modeling. Current Microshutter Array yield and operation performance issues related to fabrication process are analyzed with this numerical model and a potential optimized design is proposed. The result shows that a few μm shorter shutter blade allows stable electrostatic actuation as well as better tolerance to the fabrication accuracy. Also, modified blade side shape reduces undesirable asymmetrical motions which cause failed stuck shutters.

下一代微快门阵列（NGMSA）是一种静电操作的微机电系统（MEMS）设备，用于可编程空间光过滤应用。磁操作的原始微快门阵列（MSA）是为James Webb空间望远镜（JWST）NIRSpec多对象光谱仪开发的，NGMSA继承了原始MSA的设计。即使为了实现稳定的静电驱动而进行了增量设计更改，但NGMSA的运行仍需要进一步研究。由于模拟和实验方法不充分，以前为NGMSA的致动力学建模的模拟工作只能获得对行为的一般理解。在这项研究中，利用COMSOL Multiphysics提出了一种新颖的静电数值模拟模型，以精确预测致动期间微快门的运动。新模型解决了所有阻碍现实建模的问题。利用该数值模型分析了当前与制造工艺相关的微快门阵列成品率和操作性能问题，并提出了一种潜在的优化设计。结果表明μ米短快门叶片允许稳定的静电致动以及对加工精度更好的耐受性。而且，改进的叶片侧面形状减少了不希望的不对称运动，该不对称运动导致了卡住的百叶窗失效。