The three-dimensional (3D) distribution of nanosized silicon (Si) crystallites within a hydrogenated nanocrystalline Si (nc-Si:H) material is examined by laser-assisted atom probe tomography (APT). The amorphous and crystalline phases in nc-Si:H are distinguished by obtaining the 3D density distribution of H atoms, because the former contains a high H density. The H content in the amorphous phase is estimated to be approximately 15at% by APT, which is consistent with that obtained by infrared spectroscopy. Thus, the 3D analysis of H distribution via APT is a powerful method to visualize the real shape of nanosized crystallites within nc-Si:H materials.

通过激光辅助原子探针层析成像（APT）检查了氢化纳米晶Si（nc-Si：H）材料中纳米硅（Si）晶粒的三维（3D）分布。nc-Si：H中的非晶相和结晶相通过获得H原子的3D密度分布来区分，因为前者包含高H密度。通过APT估计非晶相中的H含量约为15at％，这与通过红外光谱法获得的含量一致。因此，通过APT对H分布进行3D分析是一种可视化nc-Si：H材料中纳米微晶真实形状的有效方法。