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Crystallite distribution analysis based on hydrogen content in thin-film nanocrystalline silicon solar cells by atom probe tomography
Applied Physics Express ( IF 2.3 ) Pub Date : 2021-01-12 , DOI: 10.35848/1882-0786/abd13f
Yasuo Shimizu 1 , Hitoshi Sai 2 , Takuya Matsui 2 , Kenji Taki 3 , Taiki Hashiguchi 3 , Hirotaka Katayama 3 , Mitsuhiro Matsumoto 3 , Akira Terakawa 3 , Koji Inoue 4 , Yasuyoshi Nagai 4
Affiliation  

The three-dimensional (3D) distribution of nanosized silicon (Si) crystallites within a hydrogenated nanocrystalline Si (nc-Si:H) material is examined by laser-assisted atom probe tomography (APT). The amorphous and crystalline phases in nc-Si:H are distinguished by obtaining the 3D density distribution of H atoms, because the former contains a high H density. The H content in the amorphous phase is estimated to be approximately 15at% by APT, which is consistent with that obtained by infrared spectroscopy. Thus, the 3D analysis of H distribution via APT is a powerful method to visualize the real shape of nanosized crystallites within nc-Si:H materials.



中文翻译:

基于原子探针层析成像的薄膜纳米晶硅太阳能电池中氢含量的微晶分布分析

通过激光辅助原子探针层析成像(APT)检查了氢化纳米晶Si(nc-Si:H)材料中纳米硅(Si)晶粒的三维(3D)分布。nc-Si:H中的非晶相和结晶相通过获得H原子的3D密度分布来区分,因为前者包含高H密度。通过APT估计非晶相中的H含量约为15at%,这与通过红外光谱法获得的含量一致。因此,通过APT对H分布进行3D分析是一种可视化nc-Si:H材料中纳米微晶真实形状的有效方法。

更新日期:2021-01-12
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