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Atomically sculptured heart in oxide film using convergent electron beam
Applied Microscopy Pub Date : 2021-01-11 , DOI: 10.1186/s42649-020-00050-7
Gwangyeob Lee , Seung-Hyub Baek , Hye Jung Chang

We demonstrate a fabrication of an atomically controlled single-crystal heart-shaped nanostructure using a convergent electron beam in a scanning transmission electron microscope. The delicately controlled e-beam enable epitaxial crystallization of perovskite oxide LaAlO 3 grown out of the relative conductive interface (i.e. 2 dimensional electron gas) between amorphous LaAlO 3 /crystalline SrTiO 3 .

中文翻译:

使用会聚电子束在氧化膜中原子雕刻心脏

我们展示了在扫描透射电子显微镜中使用会聚电子束制造原子控制的单晶心形纳米结构。精细控制的电子束使钙钛矿氧化物 LaAlO 3 的外延结晶能够从非晶 LaAlO 3 /结晶 SrTiO 3 之间的相对导电界面(即二维电子气)中生长出来。
更新日期:2021-01-11
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