This paper proposes a wireless passive vibration sensor based on high-temperature ceramics for vibration measurement in harsh environments such as automotive and advanced engines. The sensor can be equivalent to an acceleration-sensitive RF LC resonance tank. The structural design of the LC tank and the signal wireless sensing mechanism are introduced in detail. The high-temperature mechanical properties of the sensitive structure are analyzed using ANSYS at 25–400°C, which proves the usability of the vibration sensor in high-temperature environment. The three-dimensional integrated manufacturing of vibration sensors with a beam-mass structure based on high-temperature ceramics is completed by a bonding process. Finally, the performance of the sensor is tested on a built experimental platform, and the results show that the vibration sensitivity is approximately 1.303 mv/m·s^-2, and the nonlinear error is approximately 4.3%. The vibration sensor can work normally within 250°C, and the sensitivity is 0.989 mv/m·s^-2.

中文翻译：

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基于高温陶瓷的恶劣环境无线被动振动传感器

本文提出了一种基于高温陶瓷的无线被动振动传感器，用于在恶劣环境下（例如汽车和高级发动机）进行振动测量。该传感器可以等效于对加速度敏感的RF LC谐振箱。详细介绍了LC储罐的结构设计和信号无线传感机制。使用ANSYS在25–400°C下分析了敏感结构的高温机械性能，这证明了振动传感器在高温环境中的可用性。通过结合工艺完成了基于高温陶瓷的束质量结构振动传感器的三维集成制造。最后，在内置的实验平台上测试传感器的性能，^-2，非线性误差约为4.3％。振动传感器可以在250°C内正常工作，灵敏度为0.989 mv / m·s ^-2。