Abstract

Barium titanate (BaTiO₃) is a ferroelectric and piezoelectric material with excellent components. Barium titanate film success fully made with various concentration of CeO₂ 0%, 2%, 4%, and 6% through Chemical Solution Deposition (CSD) method in annealed process at 550 °C for 23.5 hours and the spin coating technique with a speed of 8000 rpm. The results of the crystal properties test showed that the lattice parameters with various concentration of CeO₂ 0%, 2%, 4%, 6% respectively a = b = 4.0491 Å and c = 4.0258 Å; a = b = 4.06267 Å and c = 4.0355 Å; a = b = 4.0549 Å and c = 4.0249 Å; a = b = 4.0547 Å and c = 4.0385 Å so that the crystal structure is tetragonal. The results of the optical properties test that the index refractive resulted in 1.4842, 1.4508, 1.4917, and 1.5175. The piezoelectric response test gets results of the piezoelectric voltage constant in the range 33.3322–43.1052 Vm/N, piezoelectric charge constants in the range 1.4700 × 10⁻⁷–1.9074 × 10⁻⁷ C/N and mechanical strain in the range 166.0147 to 329.1333. Based on characterization results and tested, cerium oxide doped barium titanate film have potential to develop being piezoelectric sensor.

摘要

钛酸钡（BaTiO ₃）是具有优良成分的铁电和压电材料。通过化学溶液沉积（CSD）方法在550°C下退火23.5小时并通过高速旋涂技术，成功完成了各种浓度的CeO ₂ 0％，2％，4％和6％的钛酸钡薄膜的成功制备8000 rpm 晶体性能测试结果表明，不同浓度的CeO ₂的晶格参数分别为0％，2％，4％，6％a = b = 4.0491Å和c = 4.0258Å; a = b = 4.06267Å和c = 4.0355Å; a = b = 4.0549Å和c = 4.0249Å; a = b = 4.0547Å，c = 4.0385Å，因此晶体结构是四方的。光学性质的结果测试为折射率折光得到1.4842、1.4508、1.4917和1.5175。压电响应测试得到的结果是：压电电压常数在33.3322–43.1052 Vm / N范围内，压电电荷常数在1.4700×10 ^-7 –1.9074×10 ^-7 C / N范围内，机械应变在166.0147至329.1333范围内。根据表征结果和测试，氧化铈掺杂钛酸钡薄膜具有发展成为压电传感器的潜力。