In order to improve the accuracy and stability of the displacement measurement of the nano-grating sensor, and to ensure that the measurement time is shorter, this paper proposes a nano-grating sensor displacement measurement technology based on the HHT algorithm. First, the HHT algorithm is used to sample the displacement data of the nano-grating sensor, and the interference signal is preprocessed. Among them, the CORDIC algorithm is used to subdivide the signal. Secondly, the HHT algorithm is used to effectively estimate the amplitude of the two detection signals that have been obtained. So far, the displacement measurement of the nano-grating sensor based on the HHT algorithm is completed. Finally, experiments are carried out, and the results show that the designed measurement technology can not only greatly shorten the measurement time, but also effectively ensure the output stability and accuracy of the measurement results, and effectively improve the work efficiency of the nano-grating sensor displacement measurement technology.

为了提高纳米光栅传感器位移测量的准确性和稳定性，并保证测量时间的缩短，提出了一种基于HHT算法的纳米光栅传感器位移测量技术。首先，使用HHT算法对纳米光栅传感器的位移数据进行采样，并对干扰信号进行预处理。其中，CORDIC算法用于细分信号。其次，HHT算法用于有效地估计已获得的两个检测信号的幅度。至此，完成了基于HHT算法的纳米光栅传感器的位移测量。最后进行了实验，结果表明所设计的测量技术不仅可以大大缩短测量时间，