Laser induced backside wet etching (LIBWE), a simple-setup process capable of processing transparent materials, has been studied to overcome difficulties in glass micromachining. However, LIBWE still show practical difficulty in machining various glass applications due to the crack occurrence and unprecise final geometry. This study proposes the error-compensating scan path generation method for the precise fabrication of glass microstructures without additional devices. In conventional scan paths, the overlap of scan path’s initial and final points, constant scan path patterns and uneven distributions of laser irradiation were the leading causes of geometric errors. The scan path generation method was developed to minimize or eliminate the causes of geometric errors in conventional scan path methods. Machined results, with error-compensating scan path, showed the removal of significant error from conventional paths with proper material removal rates. The effects of scan path generation parameters on the machining characteristics were also investigated. By adjusting the scan duty ratio and laser irradiation distribution of the entire scan path, micropockets with an average surface roughness of 0.26 μm could be processed at a material removal rate of 29,700 μm³/s. Based on machining characteristics of the error-compensating scan path, various glass microstructures were fabricated and the feasibility of the proposed method was verified.

为了克服玻璃微加工中的困难，已经研究了激光诱导的背面湿法蚀刻（LIBWE），该工艺简单易行，能够处理透明材料。但是，由于裂纹的产生和最终几何形状的不精确，LIBWE在加工各种玻璃应用中仍然显示出实际的困难。这项研究提出了一种误差补偿的扫描路径生成方法，用于无需额外设备即可精确制造玻璃微结构。在常规扫描路径中，扫描路径的起点和终点重叠，恒定的扫描路径图案和不均匀的激光辐照分布是造成几何误差的主要原因。开发扫描路径生成方法以最小化或消除传统扫描路径方法中几何误差的原因。加工结果 带有误差补偿扫描路径的扫描仪，显示出以适当的材料去除率从传统路径中去除了明显的误差。还研究了扫描路径生成参数对加工特性的影响。通过调整扫描占空比和整个扫描路径的激光照射分布，可以以29,700μm的材料去除率处理平均表面粗糙度为0.26μm的微口袋。³ /秒 根据误差补偿扫描路径的加工特性，制造了各种玻璃微结构，并验证了该方法的可行性。