Abstract

Silicon photonics is the most important technological platform for creating a variety of functional optical elements, including promising types of optical sensors. Moreover, in recent years, 20% of all publications on silicon photonics are devoted to the development of various versions of optical sensors. Their advantage steams from the combination of high technical parameters with the possibility of mass production using CMOS technology of microelectronics and nanophotonics. A brief description of various technological solutions of the last decade that provide progress in the development of optical sensor characteristics is given. Special attention is paid to new promising sensor designs based on bimodal technology, which promises a significant increase in sensor sensitivity by means of equalizing the group delay of a pair of different optical modes propagating through the waveguide structure. The review will be useful for domestic and foreign researchers working in the field of sensor development.

中文翻译：

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基于硅的集成光学传感器概述：十年的预测和结果[特邀文章]

摘要

硅光子学是创建各种功能性光学元件（包括有前途的光学传感器）的最重要的技术平台。而且，近年来，关于硅光子学的所有出版物中有20％致力于开发各种版本的光学传感器。它们的优势源于高技术参数与使用微电子学和纳米光子学的CMOS技术进行批量生产的结合。简要介绍了近十年来在光学传感器特性开发方面取得进展的各种技术解决方案。特别注意基于双峰技术的新的有前途的传感器设计，通过均衡传播通过波导结构的一对不同光学模式的群延迟，这有望显着提高传感器灵敏度。这篇综述对从事传感器开发领域的国内外研究人员将是有用的。