Purpose

The purpose of this study is the design, fabrication and evaluation of a miniature ozone generator using the principle of electric discharge are presented.

Design/methodology/approach

The device was fabricated using a low-temperature co-fired ceramics (LTCC) technology, by which a multilayered ceramic structure with integrated electrodes, buried channels and cavities in micro and millimeter scales was realized.

Findings

The developed ozone generator with the dimensions of 63.6 × 41.8 × 1.3 mm produces approximately 1 vol. % of ozone in oxygen flow of 15 ml/min, at an applied voltage of 7 kV.

Originality/value

A miniature ozone generator, manufactured in LTCC technology, produces high amount of ozone and more than it is described in the available references or in datasheets of commercial devices of similar size.

中文翻译：

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由低温共烧陶瓷制成的小型臭氧发生器

目的

这项研究的目的是介绍一种利用放电原理的微型臭氧发生器的设计，制造和评估。

设计/方法/方法

该器件是使用低温共烧陶瓷（LTCC）技术制造的，通过这种技术，可以实现具有集成电极，埋入通道以及微和毫米级空腔的多层陶瓷结构。

发现

尺寸为63.6×41.8×1.3 mm的已开发臭氧发生器可产生约1 vol。在施加电压为7 kV的条件下，氧气流量中的臭氧百分比为15 ml / min。

创意/价值

用LTCC技术制造的微型臭氧发生器可产生大量臭氧，并且其数量超过可用参考文献或类似尺寸的商用设备的数据表中所述的数量。