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Germanium Source Metal Drain Tunnel FET with Dual Dielectric Underlap
Silicon ( IF 3.4 ) Pub Date : 2021-01-11 , DOI: 10.1007/s12633-020-00919-y
Anam Khan , , Hend I. Alkhammash , Sajad A. Loan

In this paper, we propose, design and simulate a new double gate (DG) tunnel field effect transistor (TFET), using germanium (Ge) source, dual dielectric gate oxide, gate/drain underlap and a metal drain. The device is designed to address two important issues of a conventional TFET, that is, the poor ON current (ION) and the presence of ambipolar conduction. In the proposed device, the use of Ge material for the source region and a dual dielectric gate oxide enhances the ION significantly and employing metallic drain and a gate-drain underlap fully suppresses the ambipolarity conduction. This can be attributed to the formation of a Schottky barrier at channel/drain interface. Two-dimensional (2D) calibrated simulation studies have been performed using the commercial TCAD device simulator. The results have shown that the ION has improved by almost ~3 orders whereas ambipolar current is completely suppressed in the proposed device in comparison to the conventional DG-TFET. Further, it has been found that the proposed device has a subthreshold slope (SS) of 35 mV/dec, ION of ~2×10−4 A/ μm and the ION to IOFF ratio (ION/IOFF) of ~1013. The proposed device performance can be improved further by optimizing various device parameters, like underlap length etc. A flow chart mentioning the key fabrication steps has also been proposed to fabricate the proposed device.



中文翻译:

具有双介电衬底的锗源金属漏极隧道FET

在本文中,我们使用锗(Ge)源,双电介质栅氧化物,栅/漏底衬和金属漏,提出,设计和模拟了一种新型的双栅(DG)隧道场效应晶体管(TFET)。该器件旨在解决传统TFET的两个重要问题,即导通电流(I ON)不良和双极性导电的存在。在所提出的器件中,使用Ge材料作为源极区域和双电介质栅氧化物可增强I ON显着的是,采用金属漏极和栅极漏极的下重叠可完全抑制双极性传导。这可以归因于在沟道/漏极界面处形成了肖特基势垒。已使用商用TCAD设备模拟器进行了二维(2D)校准的模拟研究。结果表明,与传统的DG-TFET相比,该器件的I ON改善了约3个数量级,而双极性电流被完全抑制了。此外,已经发现,所提出的设备具有一个亚阈值斜率35毫伏/癸的(SS),I ON〜2×10 -4 A /微米和I ON到I OFF比(I ON / I OFF)的〜10 13。可以通过优化各种器件参数(如重叠长度等)来进一步提高所提出的器件性能。还提出了提及关键制造步骤的流程图来制造所提出的器件。

更新日期:2021-01-11
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