A novel two-axis piezoelectric tilting mirror (PETM) was proposed for optical assisted micromanipulation, which avoided the shortcomings of high capacitance, relatively high cost and complex structure of general multi-axis steering mirrors using piezoelectric ceramic stack actuator. The developed PETM realized two-axis tilting motions via a simple bonded-type piezoelectric composite beam. The parametric sensitivity analyses of the tilting range and the fundamental frequency to the structural parameters were performed via FEM simulation, which facilitated serialization of the PETM. A tentative prototype was fabricated, and an experimental setup was built to carry out verification experiments. The preliminary characteristic tests including coupling motion, hysteresis and tilting motion resolution were accomplished to investigate its performances; the feasibility of closed-loop application of the PETM was confirmed by positioning and tracking experiments, which revealed its features of fast response, high positioning accuracy and feasible motion tracking capacity. Furthermore, the potential application of the PETM to manipulate laser beam in micromanipulation system was demonstrated preliminarily. In brief, the developed PETM realized low capacitance of 13.61 nF per axis to reduce the requirement for power amplifier. It can be a suitable device for optical assisted micromanipulation system by virtue of fast response, simple structure and extensible characteristics.

提出了一种新颖的用于光学辅助微操纵的两轴压电倾斜镜（PETM），避免了使用压电陶瓷叠层致动器的普通多轴转向镜的高电容，相对较高的成本和结构复杂的缺点。所开发的PETM通过简单的粘结型压电复合梁实现了两轴倾斜运动。通过有限元模拟对倾斜范围和基频对结构参数进行了参数敏感性分析，这有助于PETM的序列化。制造了一个试探性的原型，并建立了一个实验装置来进行验证实验。完成了包括耦合运动，磁滞和倾斜运动分辨率在内的初步特性测试，以研究其性能。定位跟踪实验证实了PETM闭环应用的可行性，揭示了其响应速度快，定位精度高，运动跟踪能力可行的特点。此外，初步证明了PETM在微操纵系统中操纵激光束的潜在应用。简而言之，开发的PETM实现了每轴13.61 nF的低电容，从而降低了对功率放大器的需求。它具有响应速度快，结构简单和可扩展的特点，因此可以作为光学辅助微操纵系统的合适设备。初步证明了PETM在微操纵系统中操纵激光束的潜在应用。简而言之，开发的PETM实现了每轴13.61 nF的低电容，从而降低了对功率放大器的需求。它具有响应速度快，结构简单和可扩展的特点，因此可以作为光学辅助微操纵系统的合适设备。初步证明了PETM在微操纵系统中操纵激光束的潜在应用。简而言之，开发的PETM实现了每轴13.61 nF的低电容，从而降低了对功率放大器的需求。它具有响应速度快，结构简单和可扩展的特点，因此可以作为光学辅助微操纵系统的合适设备。