In this paper, a procedure to release SU-8 layers from glass substrates using typical undesirable effects is described. The proposed process can be used as lift off or stripping. The releasing method consists in taking advantage of the undesired thermal delamination, and the effect of UV overexposure on the delamination temperature, which are considered undesirable effects. This implies the use of SU-8 for both structural and lift off using the same facilities, without any additional photoresist, material, remover or developer. In this way, the fabrication of a glass/gold microelectrodes array (MEA) for cell culture applications is carried out as a proof of concept. The MEA is composed of gold tracks of 1.5 mm width and 8 electrodes with radii between 25 and 500 \(\upmu \hbox {m}\) at its ends. The SU-8 photoresist is also used as an insulation layer releasing the pads and the electrodes. Finally, biological experiments with neuroblastoma cells SK-N-SH cultured on the MEA surface were carried out in order to validate and demonstrate the biocompatibility of both the MEA and the process. The fabrication and biological results were successful, showing a normal cell proliferation over the developed MEA.

在本文中，描述了使用典型不良影响从玻璃基板上剥离SU-8层的过程。所提出的方法可以用作剥离或剥离。释放方法在于利用不期望的热分层以及UV过度曝光对分层温度的影响，这被认为是不期望的。这意味着使用相同的设备将SU-8用于结构化和剥离，而无需任何额外的光刻胶，材料，去除剂或显影剂。以这种方式，进行了用于细胞培养的玻璃/金微电极阵列（MEA）的制造作为概念证明。MEA由1.5毫米宽的金轨和8个电极组成，半径在25到500 \（\ upmu \ hbox {m} \）之间在其末端。SU-8光刻胶还可用作绝缘层，可释放焊盘和电极。最后，对在MEA表面上培养的神经母细胞瘤细胞SK-N-SH进行了生物学实验，以验证和证明MEA和该工艺的生物相容性。制备和生物学结果是成功的，表明在发达的MEA上细胞正常增殖。