Effective-medium-clad dielectric waveguides are purely built into a single high-resistivity float-zone silicon wafer with their claddings defined by deep subwavelength perforations. The waveguides are substrate-free while supporting both $E_{11}^x$ and $E_{11}^y$ modes with low loss and low dispersion. This article extends the investigations of the waveguides by analyzing the dispersion, cross-polarization, and crosstalk together with the characteristics of bends and crossings over an operation frequency range of 220–330 GHz (WR-3 band). Taking the $E_{11}^x$ mode as an example, the experimental results show an average measured attenuation coefficient of 0.075 dB/cm and a group velocity dispersion ranging from around $\pm$10 ps/THz/mm across the whole band. A crosstalk level below $-$10 dB is measured for parallel waveguides with a separation of 0.52$\lambda _{0}$ at 300 GHz. The realized waveguides show a bending loss ranging from 0.500 to 0.025 dB per bend and a crosstalk at crossing below $-$15 dB from 220 to 330 GHz. Due to the different dispersion characteristics, the $E_{11}^y$ mode has similar performances but with its operation frequency range reduced to 260–330 GHz. Limited by the measurement setup, a cross-coupling between the $E_{11}^x$ and $E_{11}^y$ modes is measured to be below $-$20 dB over the whole band. This in-depth investigation of effective-medium-clad waveguides will form a basis for terahertz-integrated platforms.

中文翻译：

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有效介质包覆介质波导的特性

有效介质包层介电波导完全内置于单个高电阻率浮区硅晶片中，其包层由深亚波长穿孔定义。波导是无基板的，同时支持两者$E_{11}^x$ 和 $E_{11}^y$低损耗和低色散模式。本文通过分析色散、交叉极化和串扰以及 220–330 GHz（WR-3 频段）工作频率范围内的弯曲和交叉特性，扩展了波导的研究。采取$E_{11}^x$ 以模式为例，实验结果表明平均测量衰减系数为 0.075 dB/cm，群速度色散范围为 $\下午$整个频段为 10 ps/THz/mm。串扰水平低于$-$对于间隔为 0.52 的平行波导，测量值为 10 dB$\lambda _{0}$在 300 GHz。实现的波导表现出每弯曲 0.500 至 0.025 dB 的弯曲损耗和下方交叉处的串扰$-$从 220 到 330 GHz 为 15 dB。由于分散特性不同，$E_{11}^y$模式具有相似的性能，但其工作频率范围降低到 260–330 GHz。受测量设置的限制，$E_{11}^x$ 和 $E_{11}^y$ 模式被测量为低于 $-$整个频段为 20 dB。对有效介质包覆波导的深入研究将为太赫兹集成平台奠定基础。