Lumped-element superconducting resonators are a promising technology for their use in millimeter-wave observations and quantum computing applications that require large arrays of extremely sensitive detectors. Among them, lumped-element kinetic inductance detectors (LEKIDs) have shown good performance in the submillimeter band in several earth-based telescopes. In this work, LEKIDs for their use as millimeter-wave receivers of astronomical applications are presented. LEKID arrays using a thin bilayer of superconducting titanium/aluminum (Ti/Al), deposited on the silicon substrate, have been designed and fabricated. The design of a dual-polarization LEKID with the goal of detection at the $W$ -band for two orthogonal polarizations is described and a fabricated array has demonstrated absorption at ambient temperature. Also, an approximate design methodology of the coupling parameter for LEKIDs’ readout, essential for dynamic range optimization of the detector under millimeter-wave radiation, is proposed. In addition, the resonance characteristics and coupling factor of the fabricated superconducting resonators using high-quality internal factor $Q_{i}$ under cryogenic temperatures have been analyzed. The design guidelines in this work are applicable to other LEKID arrays, and the presented superconducting Ti/Al thin-film LEKIDs can be used in future receiver arrays in the millimeter bands.

中文翻译：

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W波段集总元件动感检测器的分析与性能

集总元件超导谐振器是一种很有前途的技术，可用于毫米波观测和需要大阵列极其灵敏探测器的量子计算应用。其中，集总元件动感电感探测器（LEKID）在几台地基望远镜中已在亚毫米波段表现出良好的性能。在这项工作中，介绍了用作天文应用的毫米波接收器的 LEKID。已经设计并制造了使用沉积在硅衬底上的超导钛/铝 (Ti/Al) 薄双层的 LEKID 阵列。描述了双极化 LEKID 的设计，其目标是在 $W$ 波段检测两个正交极化，并且制造的阵列已证明在环境温度下有吸收。还，提出了一种LEKID 读出耦合参数的近似设计方法，这对于毫米波辐射下探测器的动态范围优化至关重要。此外，还分析了在低温下使用高质量内部因子$Q_{i}$制造的超导谐振器的谐振特性和耦合因子。这项工作中的设计指南适用于其他 LEKID 阵列，所提出的超导 Ti/Al 薄膜 LEKID 可用于未来毫米波段的接收器阵列。分析了采用高质量内因数$Q_{i}$制备的超导谐振器在低温下的谐振特性和耦合系数。这项工作中的设计指南适用于其他 LEKID 阵列，所提出的超导 Ti/Al 薄膜 LEKID 可用于未来毫米波段的接收器阵列。分析了采用高质量内因数$Q_{i}$制备的超导谐振器在低温下的谐振特性和耦合系数。这项工作中的设计指南适用于其他 LEKID 阵列，所提出的超导 Ti/Al 薄膜 LEKID 可用于未来毫米波段的接收器阵列。