In this Letter, the broadband operation in wavelengths from 520 nm to 980 nm is demonstrated on silicon nitride nanophotonic phased arrays. The widest beam steering angle of 65° on a silicon nitride phased array is achieved. The optical radiation efficiency of the main grating lobe in a broad wavelength range is measured and analyzed theoretically. The optical spots radiated from the phased array chip are studied at different wavelengths of lasers. The nanophotonic phased array is excited by a supercontinuum laser source for a wide range of beam steering for the first time to the best of our knowledge. It paves the way to tune the wavelength from visible to near infrared range for silicon nitride nanophotonic phased arrays.

中文翻译：

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宽带氮化硅纳米光子相控阵用于广角光束转向

在这封信中，在氮化硅纳米光子相控阵列上证明了在520 nm至980 nm波长范围内的宽带操作。在氮化硅相控阵列上实现了65°的最宽光束转向角。从理论上测量并分析了宽波长范围内主光栅波瓣的光辐射效率。研究了在不同波长的激光下从相控阵芯片辐射的光斑。据我们所知，纳米光子相控阵首次被超连续激光源激发，可进行大范围的光束转向。它为将氮化硅纳米光子相控阵列的波长从可见光范围调整到近红外范围铺平了道路。