The nitrogen vacancy (NV) center in diamond has wide applications in sensing, imaging and quantum information processing. One of the bases of these applications is to localize the NV center in diamond with high precision. In this work we demonstrate a method for nanoscale imaging and locating near-surface NV centers on diamond waveguides based on an atomic force microscopy (AFM) combined confocal system. The resulted lateral resolution for imaging the NV center is 31.6 nm and the precision of locating the NV center in diamond is 0.7 nm. Finally, the position of the NV center is indicated in AFM images of the diamond waveguide. These results provide a useful characterization tool for optimizing the diamond nanostructure for quantum information processing and quantum sensing.

钻石中的氮空位（NV）中心在传感，成像和量子信息处理中具有广泛的应用。这些应用程序的基础之一是高精度地将NV中心定位在钻石中。在这项工作中，我们演示了一种基于原子力显微镜（AFM）组合共焦系统的纳米级成像和在金刚石波导上定位近表面NV中心的方法。用于对NV中心成像的横向分辨率为31.6 nm，在钻石中定位NV中心的精度为0.7 nm。最后，在金刚石波导的AFM图像中指示NV中心的位置。这些结果为优化金刚石纳米结构用于量子信息处理和量子感测提供了有用的表征工具。