BACKGROUND:Titanium nitride (TiN), titanium carbide (TiC) and titanium carbonitride (TiNC) thin films show promising practical applications due to their photoelectric properties and corrosion behaviour. OBJECTIVE:In this work, we investigated the factors which may affect the optical properties andthe corrosion behaviour of these coatings. METHODS:The titanium coatings were carried out by sputtering using the target of Ti6Al4V (purity 99.96%) with different N2, CH4 and Ar partial pressures. XRD, FTIR, Raman and SEM with EDX studies show the formation of titanium nitride, titanium carbide coatings. Uv-vis spectroscopy was carried out to estimate the optical properties using the numerical Swanepoel method. Potentiodynamic polarization studies in Hank’s solution show that the corrosion resistance is found to be in the order of C-TiN(2) > C-TiN(1) > TiN > TiC. RESULTS:A high protective efficiency was determined (60%) when comparing TiNC(2) and TiC corrosion current densities, which confirms the lower corrosion velocity and the higher passivation stability of the coatings composed with TiN and TiC phases. Electrochemical impedance spectroscopy studies show that the Rct increases in the following order: TiC < TiN < C-TiN(1) < C-TiN(2), highlighting the fact that C-TiN(2) coating has the higher corrosion resistance.

中文翻译：

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射频磁控溅射沉积TiC、TiN和TiNC薄膜的双向性能

背景：氮化钛（TiN）、碳化钛（TiC）和碳氮化钛（TiNC）薄膜由于其光电特性和腐蚀行为而显示出广阔的实际应用前景。目的：在这项工作中，我们研究了可能影响这些涂层的光学性能和腐蚀行为的因素。方法：以Ti6Al4V（纯度99.96%）为靶材，在不同N2、CH4、Ar分压下溅射镀钛涂层。XRD、FTIR、拉曼和 SEM 与 EDX 研究显示氮化钛、碳化钛涂层的形成。使用数值 Swanepoel 方法进行紫外-可见光谱来估计光学性质。Hank溶液中的动电位极化研究表明，耐腐蚀性能的顺序为C-TiN(2) > C-TiN(1) > TiN > TiC。结果：比较TiNC(2)和TiC腐蚀电流密度时确定了较高的防护效率(60%)，这证实了TiN和TiC相组成的涂层具有较低的腐蚀速度和较高的钝化稳定性。电化学阻抗谱研究表明，Rct按以下顺序增加：TiC < TiN < C-TiN(1) < C-TiN(2)，凸显了C-TiN(2)涂层具有更高的耐腐蚀性。