Optical Materials ( IF 3.8 ) Pub Date : 2021-01-06 , DOI: 10.1016/j.optmat.2021.110800 Yuchen Shao , Yuan'an Zhao , Hao Ma , Cheng Li , Dawei Li , Jianda Shao
An investigation of the impact of solvent content on polymerization feature size in multi-photon polymerization is presented. The negative tone, epoxy photoresist SU-8 is employed, and variety pre-baking time is set to obtain different solvent content. A convenient method, exposure under long-focal length and single pulse, is suggested to evaluate the impact of solvent. By measuring the polymer size under microscope, it shows that the polymerized diameters are reduced by ~40% due to only 4% loss of the solvent content. The inhibition of the mobility of photon-induced H+ cations due to the less solvent is considered to be responsible for the refinement of polymer feature size. It is because that the mobility of photon-induced H+ cation from high to low concentration area is restricted by reducing the solvent. The adjusting solvent content shows its potential to refine the feature size of MPP without influencing the degree of polymerization.
中文翻译:
通过优化SU-8光刻胶中的溶剂含量来细化多光子聚合特征尺寸
提出了在多光子聚合中溶剂含量对聚合特征尺寸的影响的研究。使用负性环氧光致抗蚀剂SU-8,并设置各种预烘烤时间以获得不同的溶剂含量。建议使用一种方便的方法,即在长焦距和单脉冲下曝光,以评估溶剂的影响。通过在显微镜下测量聚合物尺寸,可知由于溶剂含量仅损失4%,聚合直径减少了约40%。由于较少的溶剂,对光子诱导的H +阳离子迁移率的抑制被认为是聚合物特征尺寸细化的原因。这是因为光子诱导的H +的迁移率通过减少溶剂限制阳离子从高浓度区域到低浓度区域的流动。调节溶剂的含量显示出在不影响聚合度的情况下改进MPP的特征尺寸的潜力。