Confocal X‐ray fluorescence (XRF) spectrometry can be used to perform three‐dimensional elemental analysis, which is impossible using general micro XRF spectrometry without any collimating optics in the detection channel. In this study, we designed, for the first time, a new confocal line XRF (C‐L‐XRF) system that can obtain elemental information of a larger area and higher intensity in XRF analysis than conventional confocal point XRF (C‐P‐XRF) analysis. We evaluate the basic performance of C‐L‐XRF, such as XRF intensity and horizontal and depth spatial resolutions. We identified that the spatial resolution of C‐L‐XRF in the horizontal and depth directions is approximately 2.9 and 2.6 times those of conventional C‐P‐XRF. However, it is possible to obtain an XRF intensity that is approximately 33 times higher than C‐P‐XRF intensity. C‐L‐XRF is expected to be effective for analyzing wide‐area samples such as layered samples.

中文翻译：

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新型共焦线X射线光谱仪的基础研究

共焦X射线荧光（XRF）光谱可用于执行三维元素分析，而在检测通道中没有任何准直光学器件的情况下，使用常规的微型XRF光谱分析是不可能实现的。在本研究中，我们首次设计了一种新的共焦线XRF（C‐L‐XRF）系统，与传统的共焦点XRF（C‐P‐ XRF）分析。我们评估了C‐L‐XRF的基本性能，例如XRF强度以及水平和深度空间分辨率。我们确定了C‐L‐XRF在水平和深度方向上的空间分辨率分别约为传统C‐P‐XRF的2.9和2.6倍。但是，可以获得的XRF强度大约是C-P-XRF强度的33倍。