Mechanical resonance properties of porous graphene resonators were investigated by simulation studies. The finite element method was utilized to design the porous graphene membrane pattern and to calculate the mechanical resonance frequency and quality factor. The changes in the resonance frequency and quality factor were systematically studied by changing the size, number, and relative location of pores on the graphene membrane. Mass loss and carbon-carbon bond break were found to be the main competing parameters for determining its mechanical resonance properties. The correlation between the geometry and the damping effect on the mechanical resonance of graphene was considered by suggesting a model on the damping factor and by calculating the membrane deflections according to the pore location. Based on the simulation results, an optimal porosity and porous geometry were found that gives the maximum resonance frequency and quality factor. Suspended graphene with various number pore structures was experimentally realized, and their mechanical resonance behaviors were measured. The trend of changes in resonance frequency and quality factor according to the number of pores in the experiment was qualitatively agreed with simulation results.

通过仿真研究了多孔石墨烯谐振器的机械谐振特性。利用有限元方法设计了多孔石墨烯膜的图案，并计算了机械共振频率和品质因数。通过改变石墨烯膜上孔的大小，数量和相对位置，系统地研究了共振频率和品质因数的变化。发现质量损失和碳-碳键断裂是确定其机械共振特性的主要竞争参数。通过建立阻尼系数模型并根据孔位置计算膜挠度，考虑了几何形状与阻尼对石墨烯机械共振的影响之间的相关性。根据模拟结果，发现了最佳的孔隙率和多孔几何形状，可以提供最大的共振频率和品质因数。通过实验实现了具有各种孔结构的悬浮石墨烯，并测量了其机械共振行为。实验结果表明，共振频率和品质因数随孔数的变化趋势与模拟结果基本吻合。