In this paper, a microscale device comprising a Flared-Ψ shaped composite cantilever having polyvinylidene fluoride (PVDF) ferroelectric polymer thin-film-based unimorph structure and a single brass ring mass is designed and validated by means of finite element method (FEM) simulations and experimental examinations to scavenge energy with high normalized areal and volumetric energy density of 6.8892 × 10⁻⁴ (μW/(mm² g² Hz)) and 6.3021 × 10⁻⁴ (μW/(mm³ g² Hz)), respectively from ambient vibrations. Investigation shows that the proposed device also can be used as a single-axis low-g accelerometer with high sensitivity and good linearity for acceleration sensing applications. The maximum power and voltage output of the device are 2.401 nW and 53.67 mV, respectively over 14.1 Hz resonant frequency at 1.2 MΩ load and 0.05 g input acceleration. The lowest sensible signal and unamplified sensitivity of accelerometer are obtained to be 0.01 g and 60.5035 mV/g, respectively over 13 Hz to subhertz frequency range. The linearity of the sensitivity as a function of acceleration is obtained to be 0.0022% in the full scale.

在本文中，通过有限元方法（FEM）仿真设计并验证了一种微型装置，该装置包括具有聚偏二氟乙烯（PVDF）铁电聚合物薄膜的单压电晶片结构和单个黄铜环质量的喇叭形复合悬臂。和实验检查以清除具有高归一化面积和体积能量密度分别为6.8892×10 ^-4（μW/（mm ²  g ²  Hz））和6.3021×10 ^-4（μW/（mm ³  g ² Hz）），分别来自环境振动。研究表明，该器件还可以用作加速度传感应用中具有高灵敏度和良好线性度的单轴低重力加速度计。在1.2MΩ负载和0.05 g输入加速度的条件下，在14.1 Hz谐振频率上，该器件的最大功率和电压输出分别为2.401 nW和53.67 mV。在13 Hz至亚赫兹的频率范围内，加速度计的最低敏感信号和未放大灵敏度分别为0.01 g和60.5035 mV / g。灵敏度的线性度随加速度的变化在整个范围内为0.0022％。