The paper presents a new instrument—a portable spectroscopic quasi-optical (QO) THz ellipsometer-reflectometer (SQOTER). It combines two independent experimental techniques: THz ellipsometry and reflectometry. SQOTER is based on the hollow dielectric beamguide and beamguide components as a QO transmission line. This ultra-broadband line provides operation of the setup within 0.1…1 THz frequency range. The setup provides measurements of the ellipsometric parameters (at variable incidence angle) and the reflection coefficient (at normal incidence) in the wide spectral range. A detailed analysis of the spectral characteristics of QO transmission line and components was carried out. The principles and details of SQOTER measurements were described and its accuracy was estimated. A special system based on a silicon wafer was created for SQOTER testing. Reflection coefficients of this system measured independently by ellipsometry and reflectometry were compared and showed good agreement. The portable SQOTER capabilities connected with research and industrial applications have been demonstrated.

本文介绍了一种新仪器-便携式光谱准光学（QO）太赫兹椭圆偏振仪-反射仪（SQOTER）。它结合了两种独立的实验技术：太赫兹椭圆仪和反射仪。SQOTER基于中空介电束波导和束波导组件作为QO传输线。这条超宽带线路可在0.1…1 THz频率范围内进行设置操作。该设置可在宽光谱范围内测量椭圆度参数（在可变入射角下）和反射系数（在垂直入射下）。对QO传输线和组件的频谱特性进行了详细分析。描述了SQOTER测量的原理和细节，并估计了其准确性。创建了一个基于硅晶片的特殊系统用于SQOTER测试。比较了该系统的椭圆率和反射率分别测量的反射系数，并显示出良好的一致性。已经证明了与研究和工业应用相关的便携式SQOTER功能。