Since nonlinearity is critical to silicon piezoresistive pressure sensors, this paper combined theoretical analysis and simulation to study the effect of changing the longitudinal resistance (R_L) and transverse resistance (R_T) on the nonlinearity of pressure sensors. When initial longitudinal resistance (R_L0) is larger than initial transverse resistance (R_T0) and the difference is within a certain range, the nonlinearity of the pressure sensor can be effectively reduced. And based on this discovery, a method of an asymmetric Wheatstone bridge for optimizing nonlinearity of piezoresistive pressure sensors was proposed, which could reduce the nonlinearity from 10^–3 to 10^–6 order of magnitudes in the simulation.

由于非线性对于硅压阻式压力传感器至关重要，因此本文结合理论分析和仿真研究了改变纵向电阻（R _L）和横向电阻（R _T）对压力传感器非线性的影响。当初始纵向电阻（R _L0）大于初始横向电阻（R _T0）并且差在一定范围内时，可以有效地减小压力传感器的非线性。并基于此发现，提出了一种用于优化压阻式压力传感器非线性的非对称惠斯通电桥方法，该方法可以将非线性从10 ^–3降低至10 ^–6 模拟中的数量级。