This paper proposes a cutting-edge photolithography-based top-down approach to produce functional porous microparticles with three-dimensional (3D) periodic nanostructures. The developed fabrication process employs proximity-field nanopatterning (PnP), a representative optical 3D nanofabrication technique in which a new type of phase mask and exposure scheme have been introduced. In the modified PnP mode, where the photoresist is directly coated on the phase mask, a 3D nanostructured membrane detaches from the mask during the development process. The freestanding 3D nanostructured membrane is electromagnetically shredded through simple ultrasonication to produce a large amount of 3D-ordered porous microparticles. A Gaussian distribution of particle sizes with an average size of ∼37 m can be obtained through an optimization of the sonication time. In addition, composite porous microparticles that exhibit exceptional magnetically responsive properties can be generated by incorporating iron oxide nanoparticles into the rinsing solution as nanofillers.

本文提出了一种基于尖端光刻技术的自上而下的方法来生产具有三维（3D）周期纳米结构的功能多孔微粒。开发的制造工艺采用了近场纳米图案（PnP），这是一种代表性的光学3D纳米制造技术，其中引入了新型的相位掩膜和曝光方案。在修改后的PnP模式下，将光致抗蚀剂直接涂覆在相位掩模上，在显影过程中3D纳米结构膜会从掩模上脱落。独立的3D纳米结构膜通过简单的超声处理被电磁粉碎，从而产生大量的3D有序的多孔微粒。平均粒径约为37的高斯分布可以通过优化超声处理时间来获得m。另外，通过将氧化铁纳米颗粒作为纳米填料掺入漂洗溶液中，可以产生表现出出色的磁响应特性的复合多孔微粒。