We developed a stent flow sensor using micro-electromechanical systems (MEMS) technology in order to measure airflow in the airways of laboratory animals. An airflow waveform contains a respiration signal produced by lung motion and heartbeats as these functions are physically connected. This enables both respiration and heart functions to be evaluated under unrestrained and unanesthetized conditions during drug development. Using MEMS technology, we fabricated a tube flow sensor based on a thermal principle, and the stent structure was produced by photolithography and wet etching. The fabricated flow sensor and stent were integrated via a connection area on both elements. In the proof-of-concept trial, we verified that the flow sensor was placed in the center of the tube by expanding the stent. We evaluated the flow detection characteristics, sensor output vs flow rate and sensor response and used the developed stent flow sensor to measure the airflow in the airway of a rat. The respiration and heartbeat signals were successfully identified from the airflow waveform by applying Fourier transform analysis.

我们开发了一种使用微机电系统（MEMS）技术的支架流量传感器，以测量实验动物气道中的气流。气流波形包含通过肺运动和心跳产生的呼吸信号，因为这些功能是物理连接的。这样可以在药物开发过程中在不受约束的麻醉状态下评估呼​​吸和心脏功能。我们使用MEMS技术，基于热原理制造了一种管式流量传感器，并通过光刻和湿法蚀刻生产了支架结构。所制造的流量传感器和支架通过两个元件上的连接区域集成在一起。在概念验证试验中，我们验证了通过扩展支架将流量传感器放置在管的中心。我们评估了流量检测特性，传感器输出与流速和传感器响应之间的关系，并使用开发的支架流量传感器来测量大鼠气道中的气流。通过应用傅立叶变换分析，成功地从气流波形中识别出呼吸和心跳信号。