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Analyzing the effect of dynamic properties of materials and operating medium on sensor parameters to increase the performance of diaphragm-based static/dynamic pressure sensors
Journal of Computational Electronics ( IF 2.2 ) Pub Date : 2021-01-02 , DOI: 10.1007/s10825-020-01633-z
Timuçin Emre Tabaru , Şekip Esat Hayber

In the design of a high-performance diaphragm-based static/dynamic pressure sensor (DB-S/DPS), researchers have mostly carried out studies on static deflection and frequency analysis without including diaphragm vibration damping and the effect of the operating medium (OM). However, diaphragms and OM usually contain dynamic processes where vibration damping occurs with constantly changing frequency parameters. Therefore, to design a sensor that will work in such an OM, the effect of the dynamic pressure performance of the diaphragm materials on the sensor parameters (sensitivity, bandwidth, linearity) becomes even more important. In this study, for the first time in the literature, the effect of many different parameters on sensor parameters at the same time was analyzed by theoretically examining the dynamic deflection and static deflection expressions that the researchers did not consider in the pressure sensor design. Also, for the first time in the literature, the analysis of the dynamic parameters of many diaphragm materials and sensor operating media was carried out with this study. In order to determine the effect of the dynamic pressure performance of the diaphragms on sensor parameters in high-performance DB-S/DPS design, multiple parameter implementation (MPI) was carried out with MATLAB software. MPI has been realized considering various diaphragm materials, alternative operating media, and all the dynamic parameters (the damping ratio of the medium, added virtual mass incremental factor). In the work, metallic (Al, Au), polymer (cellulose triacetate), semiconductor (Si), glass derivative (SiO2), and two-dimensional (graphene) materials which are frequently reported in the literature were chosen as the diaphragm. The effects of these selected materials and OMs (air, water, mineral oil) on sensor parameters were examined in detail. To the best of our knowledge, there is no comprehensive study in the literature involving such dynamic pressure parameters. With this valuable research, considering the forced oscillations and damping, valuable and interesting results are presented that can guide DB-S/DPS designers.



中文翻译:

分析材料和工作介质的动态特性对传感器参数的影响,以提高基于膜片的静态/动态压力传感器的性能

在高性能的基于膜片的静/动压力传感器(DB-S / DPS)的设计中,研究人员主要进行了静态挠度和频率分析的研究,而没有考虑膜片的振动阻尼和工作介质的影响(OM )。但是,膜片和OM通常包含动态过程,其中随着频率参数的不断变化而发生振动衰减。因此,要设计可在这种OM中使用的传感器,膜片材料的动态压力性能对传感器参数(灵敏度,带宽,线性)的影响就变得更加重要。在这项研究中,这是文献中的第一次 通过理论上检查研究人员在压力传感器设计中未考虑的动态挠度和静态挠度表达式,分析了许多不同参数同时对传感器参数的影响。此外,这项研究首次在文献中对许多膜片材料和传感器工作介质的动力学参数进行了分析。为了确定高性能DB-S / DPS设计中膜片动压性能对传感器参数的影响,使用MATLAB软件进行了多参数实现(MPI)。已考虑各种隔膜材料,替代的工作介质以及所有动态参数(介质的阻尼比,增加了虚拟质量增量因子)来实现MPI。在工作中,2),并且选择文献中经常报道的二维(石墨烯)材料作为隔膜。详细检查了这些选定的材料和OM(空气,水,矿物油)对传感器参数的影响。据我们所知,文献中没有涉及这种动压力参数的全面研究。通过这项有价值的研究,考虑到强制振荡和阻尼,提出了有价值且有趣的结果,可以指导DB-S / DPS设计人员。

更新日期:2021-01-02
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