In the paper, a two dimensional slotted photonic crystal cavity (2D-SPCC) has been designed and optimized for the application of sensing. The optimized 2D-SPCC has been incorporated in a silicon cantilever to form a nano-opto-electro-mechanical system (NOEMS) for sensing the physical parameters like - force, displacement and strain. An applied force at the cantilever-tip generates strain which results in deformation of the SPCC parameters like slot-width. This structural change in the 2D-SPCC changes the optical behavior of the device, which can be sensed, and thus operate as a physical sensor. Resonant wavelengths of the SPCC are determined for different length and breadth of the cantilever. The results show a linear dependence of the resonant wavelength with the change in the physical parameters. The 2D-SPCC has a high quality factor and sensitivity of ∼9×106\sim\!9 \, \times\, 10^6 and 4.2 nm μ\muN respectively, due to which the minimum detectable force, displacement and strain for the proposed design are found as 0.0202 μ\muN, 0.090 707 μ\mum and 0.019 979 respectively for a cantilever of length 40 μ\mum and breadth 20 μ\mum. Hence, the proposed NOEMS sensor is expected to be highly relevant for different industrial applications.

中文翻译：

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基于 NOEMS 的开缝光子晶体腔，用于力传感


在本文中，为传感应用设计并优化了二维开槽光子晶体腔（2D-SPCC）。优化的 2D-SPCC 已集成到硅悬臂中，形成纳米光电机械系统 (NOEMS)，用于感测力、位移和应变等物理参数。悬臂尖端施加的力会产生应变，从而导致 SPCC 参数（例如槽宽度）变形。 2D-SPCC 中的这种结构变化改变了设备的光学行为，这种行为可以被感知，从而作为物理传感器运行。 SPCC 的谐振波长是针对不同长度和宽度的悬臂确定的。结果显示谐振波长与物理参数的变化呈线性相关。 2D-SPCC 具有高品质因数和灵敏度，分别为 ∼9×106\sim\!9 \、\times\、10^6 和 4.2 nm μ\muN，因此最小可检测力、位移和应变对于长度为 40 μ\mum 和宽度为 20 μ\mum 的悬臂，所提出的设计结果分别为 0.0202 μ\muN、0.090 707 μ\mum 和 0.019 979。因此，所提出的 NOEMS 传感器预计将与不同的工业应用高度相关。