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Design and implementation of a jellyfish otolith-inspired MEMS vector hydrophone for low-frequency detection
Microsystems & Nanoengineering ( IF 7.3 ) Pub Date : 2021-01-01 , DOI: 10.1038/s41378-020-00227-w
Renxin Wang 1 , Wei Shen 1 , Wenjun Zhang 1 , Jinlong Song 1 , Nansong Li 2 , Mengran Liu 3 , Guojun Zhang 1 , Chenyang Xue 1 , Wendong Zhang 1
Affiliation  

Detecting low-frequency underwater acoustic signals can be a challenge for marine applications. Inspired by the notably strong response of the auditory organs of pectis jellyfish to ultralow frequencies, a kind of otolith-inspired vector hydrophone (OVH) is developed, enabled by hollow buoyant spheres atop cilia. Full parametric analysis is performed to optimize the cilium structure in order to balance the resonance frequency and sensitivity. After the structural parameters of the OVH are determined, the stress distributions of various vector hydrophones are simulated and analyzed. The shock resistance of the OVH is also investigated. Finally, the OVH is fabricated and calibrated. The receiving sensitivity of the OVH is measured to be as high as −202.1 dB@100 Hz (0 dB@1 V/μPa), and the average equivalent pressure sensitivity over the frequency range of interest of the OVH reaches −173.8 dB when the frequency ranges from 20 to 200 Hz. The 3 dB polar width of the directivity pattern for the OVH is measured as 87°. Moreover, the OVH is demonstrated to operate under 10 MPa hydrostatic pressure. These results show that the OVH is promising in low-frequency underwater acoustic detection.



中文翻译:

一种用于低频检测的受水母耳石启发的 MEMS 矢量水听器的设计与实现

检测低频水声信号对于海洋应用来说可能是一个挑战。受果胶水母听觉器官对超低频率的强烈反应的启发,开发了一种受耳石启发的矢量水听器 (OVH),由纤毛顶部的空心浮球实现。执行全参数分析以优化纤毛结构,以平衡共振频率和灵敏度。确定OVH的结构参数后,对各种矢量水听器的应力分布进行仿真分析。还研究了 OVH 的抗冲击性。最后,制造和校准 OVH。OVH 的接收灵敏度实测高达 −202.1 dB@100 Hz (0 dB@1 V/μPa),当频率范围从 20 到 200 Hz 时,OVH 感兴趣的频率范围内的平均等效压力灵敏度达到 -173.8 dB。OVH 方向图的 3 dB 极宽测量为 87°。此外,OVH 被证明可以在 10 MPa 的静水压力下运行。这些结果表明 OVH 在低频水声探测中很有前景。

更新日期:2021-01-01
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