The effect of Fe dopant on structural and photosensitivity properties of ZnO thin films have been studied. The Fe-doped ZnO films were fabricated by ultrafast spray pyrolysis for 30 s. As a result, X-ray diffraction analysis demonstrates that the deposited films are polycrystalline with the hexagonal wurtzite structure. Fe doping in the ZnO system provokes not only the decrease of crystallinity and crystallite size (~50% for Fe concentration of 0.5%) but also the increase of interplanar spacing and strain. Surface morphology images show that the grain size of 3% Fe-doped ZnO (67 nm) is smaller than that of the pure ZnO (114 nm). Based on I–V characterizations, Fe doping increases photocurrent as well as UV sensitivity up to 21 times (1.5% Fe) and 70 times (3% Fe) than that of the undoped ZnO. This study is important to improve the functionality of ZnO as a UV photodetector.

研究了Fe掺杂剂对ZnO薄膜结构和光敏性能的影响。通过超快喷雾热解30 s制备了Fe掺杂的ZnO薄膜。结果，X射线衍射分析表明沉积的膜是具有六方纤锌矿结构的多晶。ZnO系统中的Fe掺杂不仅引起结晶度和晶粒尺寸的降低（Fe浓度为0.5％时约为50％），而且还引起晶面间距和应变的增加。表面形貌图像显示，掺铁3％的ZnO（67 nm）的晶粒尺寸小于纯ZnO（114 nm）的晶粒尺寸。根据IV特性，Fe掺杂将光电流和紫外线敏感性提高到未掺杂ZnO的21倍（1.5％Fe）和70倍（3％Fe）。