TiO₂ thin films were deposited on quartz substrate by RF-magnetron sputtering technique. The effect of varying oxygen fraction f(O2) = (O2/(Ar + O2) on the surface morphology, structure, electrical and optical properties was investigated. Decreasing the oxygen fraction promotes phase transformation to the extent of isolating anatase phase with well oriented A(101) preferred crystal orientation at f(O2) of 0.1%. The refractive index dispersion curves were utilized to estimate the single oscillator parameters. In addition, an enhancement in the electrical conductivity to 2.6 × 10−2Ω−1cm−1 at f(O2) = 0.1% was established. This enhancement was attributed to the deficiency of oxygen as well as the formation of anatase phase.

中文翻译：

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缺氧对TiO2薄膜分散参数的影响

采用射频磁控溅射技术在石英衬底上沉积TiO ₂薄膜。不同氧含量的影响F(○2) = (○2/(氩 + ○2)对表面形貌、结构、电学和光学性能进行了研究。降低氧分数促进相变到分离锐钛矿相的程度，具有良好取向的A（101）优选晶体取向F(○2)0.1%。折射率色散曲线用于估计单个振荡器参数。此外，导电性的增强2.6 × 10-2Ω-1厘米-1在F(○2) = 0.1％ 建立了。这种增强归因于氧气的缺乏以及锐钛矿相的形成。