An equal-period plane diffraction grating fabricated through electron beam lithography line-by-line method was designed and applied to the experiment of angle sensitivity testing. The size of the fabricated grating region was 50 × 10 mm and the period was 1526 nm. The incident light was transmitted via the Y-type fiber to collimator lens fixed on the angle disc, which can be adjusted to change the incident light angle. The diffraction spectra generated by the incident light irradiating the grating surface were collected by the optical spectrum analyzer. In this experiment, the incident light angle was fixed at 25∘. When the spot moved horizontally by 50 mm, the diffraction wavelength was basically unchanged. When the incident light angle was adjusted from 15∘ to 31∘, the diffraction wavelength was changed from 834.03 nm to 1589.80 nm, the angular sensitivity was 47.508 nm/∘, and the linearity was 0.9998.

中文翻译：

---

电子束光刻逐行法制作的等周期平面衍射光栅的角度灵敏度测试

设计了一种采用逐行电子束光刻法制作的等周期平面衍射光栅，并应用于角度灵敏度测试实验。制作的光栅区域尺寸为50 × 10mm，周期为 1526 nm。入射光通过 Y 型光纤传输到固定在角盘上的准直透镜，该准直透镜可调节以改变入射光角度。由光谱分析仪收集入射光照射光栅表面产生的衍射光谱。在本实验中，入射光角度固定为 25∘. 当光斑水平移动50 mm时，衍射波长基本不变。当入射光角度从 15∘到 31∘, 衍射波长由 834.03 nm 变为 1589.80 nm, 角灵敏度为 47.508 nm/∘, 线性为 0.9998。