Frequency-modulated continuous-wave(FMCW) interference measurement has the advantages of length traceability, large range, high precision, simple structure and optical fibre transmission. Based on the characteristics of the axial inductance sensor, a novel laser interference displacement sensor is developed. The formula of FMCW laser ranging is derived in detail and the mechanical structure and optical system of the contact displacement sensor are designed. Integrating the interferometric optical path into the sensor rod, converting non-contact measurement with cooperative targets into contact measurement can realize direct measurement of workpieces with complex surface conditions on the production line, such as free-form surfaces and oily surfaces. This technology expands the application of optical non-contact measurement. Experimental results show that the designed displacement sensor can reach a measuring range of 15 mm with a standard deviation of less than 0.01μm. It can meet the requirements of large-scale and high-precision inspection applications in the field of precision manufacturing.

中文翻译：

---

基于调频连续波的接触式位移传感器的研制

调频连续波(FMCW)干涉测量具有长度可追溯、量程大、精度高、结构简单、光纤传输等优点。基于轴向电感传感器的特点，研制了一种新型的激光干涉位移传感器。详细推导了FMCW激光测距公式，设计了接触式位移传感器的机械结构和光学系统。将干涉光路集成到传感杆中，将协同目标的非接触式测量转化为接触式测量，可实现对生产线上表面条件复杂的工件的直接测量，如自由曲面、油性表面等。该技术扩展了光学非接触式测量的应用。实验结果表明，所设计的位移传感器可以达到15 mm的测量范围，标准偏差小于0.01μm。可满足精密制造领域大规模高精度检测应用的要求。