The formation and investigation of Fe₃Si thin films by pulsed laser deposition is reported. The structural properties depending on the formation parameters are investigated. Three different approaches to the synthesis of iron-silicide thin films by pulsed laser deposition are explored: deposition from a stoichiometric alloy target, the simultaneous co-deposition of pure Fe and Si targets by two lasers and the single-laser cyclic co-deposition of pure targets.

中文翻译：

---

Fe 3 Si薄膜在不同脉冲激光沉积模式下的结构性质

报道了通过脉冲激光沉积形成和研究Fe ₃ Si薄膜的方法。研究了取决于地层参数的结构特性。探索了三种不同的通过脉冲激光沉积法合成硅化铁薄膜的方法：从化学计量合金靶进行沉积，通过两个激光同时共沉积纯铁和硅靶以及单激光循环共沉积。纯目标。