Abstract

The high efficiency of double-crystal X-ray diffractometry and topography methods in the characterization of crystals during refinement of the crystal-growth technology is demonstrated for the example of diamond bulk crystals and films obtained by the high pressure, high temperature method and by chemical vapor deposition, respectively. Techniques and study schemes for analysis of the real crystal structure, assessment of the chemical composition and the period of the crystal lattice, and analysis of the distinctive features of the deformation and thickness of thin films are described. Major structural defects (dislocations, stacking defects, inclusions of a different phase, and others) that emerge during the production of synthetic diamond crystals are identified.

中文翻译：

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双晶体X射线衍射法和形貌学方法在晶体真实结构分析中的应用

摘要

以通过高压，高温法和化学方法制得的金刚石块状晶体和薄膜为例，证明了双晶X射线衍射法和形貌学方法在改进晶体生长技术期间表征晶体的高效性。分别进行气相沉积。描述了用于分析真实晶体结构，评估化学成分和晶格周期以及分析薄膜变形和厚度的独特特征的技术和研究方案。可以确定在合成金刚石晶体生产过程中出现的主要结构缺陷（位错，堆垛层错，夹杂不同相等）。