Speckle interferometry has long been used to measure the deformation of an object with a rough surface. Currently, it can be used to measure the shape of a three-dimensional microstructure by intentionally applying a lateral shift to the measured object and analysing the change in phase due to the shift. Furthermore, the validity of this measurement method has been verified in terms of the measurement of microstructures, such as micro-silica spheres and diffraction gratings. In this study, the validity of the measurement of an object possessing an artificial shape by this method in the micro-region is analysed using micro-characters drawn by an electron-beam lithography system. It is confirmed that this method can perform the shape measurement of three-dimensional microstructures that are artificially produced. This was achieved by observing the letter ‘U’, illustrated with a line width beyond the diffraction limit of the objective lens.

中文翻译：

---

基于散斑干涉法的三维形状测量方法观察微观特征

散斑干涉测量法长期以来一直用于测量具有粗糙表面的物体的变形。目前，它可以通过对测量对象有意施加横向位移并分析由于位移引起的相位变化来测量三维微观结构的形状。此外，该测量方法的有效性在微观结构的测量方面得到了验证，例如微硅球和衍射光栅。在这项研究中，使用电子束光刻系统绘制的微字符分析了通过该方法在微区域中测量具有人工形状的物体的有效性。经证实，该方法可以对人工制造的三维微观结构进行形状测量。