Enhancing composition control of alloy nanoparticles from gas aggregation source by in operando optical emission spectroscopy,Plasma Processes and Polymers

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Enhancing composition control of alloy nanoparticles from gas aggregation source by in operando optical emission spectroscopy
Plasma Processes and Polymers ( IF 2.9 ) Pub Date : 2020-12-23 , DOI: 10.1002/ppap.202000208
Jonas Drewes ₁ , Alexander Vahl ₁ , Niko Carstens ₁ , Thomas Strunskus ₁ , Oleksandr Polonskyi _{1,

2} , Franz Faupel ₁

Affiliation

The use of multicomponent targets allows the gas‐phase synthesis of a large variety of alloy nanoparticles (NPs) via gas aggregation sources. However, the redeposition of sputtered material impacts the composition of alloy NPs, as demonstrated here for the case of AgAu alloy NPs. To enable NPs with tailored Au fractions, in operando control over the composition of the NPs is in high demand. We suggest the use of optical emission spectroscopy as a versatile diagnostic tool to determine and control the composition of the NPs. A strong correlation between operating pressure, intensity ratio of Ag and Au emission lines, and the obtained NP compositions is observed. This allows precise in operando control of alloy NP composition obtained from multicomponent targets.

中文翻译：

通过操作光发射光谱法增强气体聚集源的合金纳米粒子的成分控制

使用多组分靶标可通过气体聚集源进行气相合成多种合金纳米颗粒（NP）。但是，溅射材料的再沉积会影响合金NP的成分，如此处针对AgAu合金NP的情况所示。为了使NP具有定制的Au分数，在操作上需要对NP的组成进行控制。我们建议将光发射光谱法用作确定和控制NP组成的多功能诊断工具。观察到工作压力，Ag和Au发射线的强度比以及所获得的NP组成之间的强相关性。这使得可以精确控制从多组分靶中获得的合金NP成分。

更新日期：2020-12-23

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