Breaking the symmetry of nanosphere lithography with anisotropic plasma etching induced by temperature gradients,Nanoscale Advances

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Breaking the symmetry of nanosphere lithography with anisotropic plasma etching induced by temperature gradients
Nanoscale Advances ( IF 4.6 ) Pub Date : 2020-12-11 , DOI: 10.1039/d0na00718h
Daniel Darvill ₁ , Marzia Iarossi _{1,

2} , Ricardo M Abraham Ekeroth _{1,

3} , Aliaksandr Hubarevich ₁ , Jian-An Huang ₁ , Francesco De Angelis ₁

Affiliation

We report a novel anisotropic process, termed plasma etching induced by temperature gradients (PE-TG), which we use to modify the 3D morphology of a hexagonally close-packed polystyrene sphere array. Specifically, we combined an isotropic oxygen plasma (generated by a plasma cleaner) and a vertical temperature gradient applied from the bottom to the top of a colloidal mask to create an anisotropic etching process. As a result, an ordered array of well-defined and separated nano mushrooms is obtained. We demonstrate that the features of the mushrooms, namely the hat size and their intrinsic undercut, as well as the pillar diameter and height, can be easily tuned by adjusting the main parameters of the process i.e. the temperature gradient and etching time, or the spheres' size. We show that PS mushroom arrays can be used as nanostructured templates to fabricate plasmonic arrays, such as gold-capped nano mushrooms and ultra-small nanoapertures, by using vertical and oblique gold sputtering deposition respectively. PE-TG reveals a new, cheap and facile approach to produce plasmonic nanostructures of great interest in the fields of molecular sensing, surface-enhanced Raman scattering (SERS), energy harvesting and optoelectronics. We study the optical properties of the Au-capped nano mushroom arrays and their performance as biosensing platforms by performing SERS measurements.

中文翻译：

利用温度梯度引起的各向异性等离子体蚀刻打破纳米球光刻的对称性

我们报告了一种新颖的各向异性工艺，称为温度梯度诱导等离子蚀刻 (PE-TG)，我们用它来修改六方密堆积聚苯乙烯球体阵列的 3D 形态。具体来说，我们结合了各向同性氧等离子体（由等离子体清洁器产生）和从胶体掩模的底部到顶部施加的垂直温度梯度，以创建各向异性蚀刻工艺。结果，获得了明确且分离的纳米蘑菇的有序阵列。我们证明，蘑菇的特征，即帽子尺寸及其内在底切，以及柱子直径和高度，可以通过调整工艺的主要参数（即温度梯度和蚀刻时间）或球体来轻松调整' 尺寸。我们表明，PS蘑菇阵列可以作为纳米结构模板，通过分别使用垂直和倾斜金溅射沉积来制造等离子体阵列，例如金盖纳米蘑菇和超小纳米孔径。PE-TG 揭示了一种新的、廉价且简便的方法来生产等离激元纳米结构，该结构在分子传感、表面增强拉曼散射（SERS）、能量收集和光电子学领域引起了极大的兴趣。我们通过进行 SERS 测量来研究金帽纳米蘑菇阵列的光学特性及其作为生物传感平台的性能。

更新日期：2020-12-22

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