The stencil growth of nanoscale patterns using molecular dynamics simulation has been demonstrated. A comparison has been made to a film grown by identical conditions without the stencil. It is shown that in the case of nanoscale proximity between mask and substrate, patterns of the same dimension as the mask can be obtained. The results also indicate that the obtained nanorod presents a higher surface area than the corresponding thin film. It is demonstrated that nanorod surface roughness decreases by merging adjacent surface irregularity during the deposition.

中文翻译：

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金属纳米棒的模板生长：原子模拟

已经证明了使用分子动力学模拟的纳米级图案的模板生长。与在没有模板的情况下在相同条件下生长的薄膜进行了比较。结果表明，在掩模和基板之间纳米级接近的情况下，可以获得与掩模相同尺寸的图案。结果还表明，所获得的纳米棒比相应的薄膜具有更高的表面积。结果表明，纳米棒表面粗糙度通过在沉积过程中合并相邻的表面不规则而降低。