We have developed a primary measurement standard for trace moisture in Ar in the range of 10 nmol mol⁻¹ to 1 μmol mol⁻¹ in the amount-of-substance fraction (mole fraction) using the previously developed multi-gas trace-moisture generator. The relative expanded uncertainty (k = 2) of the primary standard in Ar was between 2.7 % and 1.5 %. The performance of a moisture analyzer (MA) based on cavity ring-down spectroscopy (CRDS), which is considered to be the best existing device thus far for trace-moisture measurement, was tested through a comparison with the primary standard in Ar. The readings of the CRDS-based MA were approximately 10 % lower than the numerical values of the primary standard. The relative standard deviation of the readings became approximately 15 %, which was 15 times as large as that for N₂. These were caused by a failure in the default setting of the MA for Ar and could be improved by optimizing the setting.

我们已经开发了在Ar中对微量水分的主要测量标准在10〜纳摩尔摩尔^-1至1微摩尔摩尔^-1中使用先前开发的多气体痕量湿气生成量-的物质分数（摩尔分数） 。相对扩展不确定度（k= 2）中Ar的主要标准介于2.7％和1.5％之间。通过与Ar中的主要标准进行比较，测试了基于腔衰荡光谱（CRDS）的水分分析仪（MA）的性能，该分析仪被认为是迄今为止用于痕量水分测量的最佳现有设备。基于CRDS的MA的读数比主要标准的数值低约10％。读数的相对标准偏差约为15％，是N _2的15倍。这些是由于Ar的MA的默认设置失败导致的，可以通过优化设置来改善。