In this paper, a static multi-longitudinal mode laser self-mixing absolute angle measurement system is developed to accurately monitor the deflection angle. The experimental results show that this multi-longitudinal mode laser angle sensor is capable of effectively measuring the deflection angle of the vertical dihedral mirror. The angle-measurement range and resolution of the self-mixing experimental sensing system can be obtained as ±22.0° and 0.008°, respectively. Furthermore, in-depth analysis of the angle-measurement error and related error sources are performed, of which the absolute error is less than 0.37° that demonstrates the good reliability and practicality of the self-mixing angle sensor.

本文开发了一种静态多纵向模式激光自混合绝对角度测量系统，以精确地监测偏转角。实验结果表明，该多纵向模式激光角度传感器能够有效地测量垂直二面镜的偏转角。自混合实验感测系统的角度测量范围和分辨率分别为±22.0°和0.008°。此外，对角度测量误差及其相关误差源进行了深入分析，其绝对误差小于0.37°，证明了自混合角度传感器具有良好的可靠性和实用性。