We have investigated the 1:1 internal mode coupling strength in a GaAs doubly-clamped MEMS beam resonator by thermally tuning the frequencies of two neighbored resonant modes. The anti-crossing of the resonant frequencies indicates that the two modes couple with each other, and the mode coupling strength was estimated by the splitting of the anti-crossed frequencies of the two modes. When the oscillation amplitudes were tuned from the weakly-driven linear regime to the strongly-driven nonlinear regime, we observed slightly increased frequency splitting, indicating that the nonlinear oscillation only makes a very small contribution to the mode coupling strength.

中文翻译：

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具有线性和非线性振荡的GaAs双钳位MEMS光束谐振器的1：1内部模式耦合强度

我们已经通过热调谐两个相邻谐振模式的频率，研究了GaAs双钳位MEMS光束谐振器中1：1的内部模式耦合强度。谐振频率的反交叉表示两个模式彼此耦合，并且通过将两个模式的反交叉频率分开来估计模式耦合强度。当将振荡幅度从弱驱动线性机制调整为强驱动非线性机制时，我们观察到频率分裂略有增加，这表明非线性振荡仅对模式耦合强度做出了很小的贡献。