Electrical tuning of bandwidth is critical for microelectromechanical system (MEMS) resonator-based narrowband filters especially at ultra-high frequency ranges and beyond. The resonance frequency of MEMS resonators is highly susceptible to fabrication process uncertainties and very small fabrication variations could result in significant shift in their resonance frequency. Although, disk resonators are the most acceptable candidates for implementing of resonators at GHz frequencies, according to their high stiffness, electrical tuning of these resonators and consequently the resulting filters is almost impossible. This study presents a novel tuning method for low velocity through anchor coupled MEMS radial contour mode disk resonators based on the coupling beam's stiffness tuning using the piezoelectric effect. As the results of this method, high bandwidth tuning ratio as 1:1.25 is achieved due to changing the tuning DC voltage from 0 to 20 V. This impressive result for a narrowband filter with 450 kHz of bandwidth is achieved due to changing the stiffness of low stiff coupling beam which is much easier to control in comparison with extremely high stiffness disk resonators. Various simulation results, as well as analytical works, verify the proposed approach.

中文翻译：

---

基于带宽控制的弱连接MEMS谐振器的窄带滤波器

带宽的电调谐对于基于微机电系统（MEMS）谐振器的窄带滤波器至关重要，尤其是在超高频范围及更高频段。MEMS谐振器的谐振频率极易受到制造工艺不确定性的影响，很小的制造偏差可能会导致其谐振频率发生明显变化。尽管盘式谐振器是在GHz频率下实现谐振器的最可接受的候选方法，但根据其高刚度，这些谐振器的电调谐以及由此产生的滤波器几乎是不可能的。这项研究提出了一种新的低速调谐方法，该方法通过使用压电效应对耦合梁的刚度进行调整，从而实现了通过锚定耦合MEMS径向轮廓模式盘式谐振器的低速调谐。作为这种方法的结果，通过将调谐DC电压从0 V更改为20 V，可以实现1：1.25的高带宽调谐比。对于带宽为450 kHz的窄带滤波器，通过改变低刚性耦合束的刚度，可以得到令人印象深刻的结果。与极高刚度的磁盘谐振器相比，更易于控制。各种仿真结果以及分析工作证明了该方法的有效性。