Increasingly stringent performance requirements for motion control necessitate the use of increasingly detailed models of the system behavior. Motion systems inherently move, therefore, spatiotemporal models of the flexible dynamics that are essential. In this article, a two-step approach for the identification of the spatiotemporal behavior of mechanical systems is developed and applied to a lightweight prototype industrial wafer stage. The proposed approach exploits a modal modeling framework and combines recently developed powerful linear-time-invariant (LTI) identification tools with a spline-based mode-shape interpolation approach to estimate the spatial system behavior. The experimental results for the wafer-stage application confirm the suitability of the proposed approach for the identification of complex position-dependent mechanical systems and its potential for motion control performance improvements.

中文翻译：

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识别位置相关机械系统：应用于柔性晶圆台的模态方法


运动控制日益严格的性能要求需要使用越来越详细的系统行为模型。因此，运动系统本质上是运动的，因此，灵活动力学的时空模型至关重要。在本文中，开发了一种用于识别机械系统时空行为的两步方法，并将其应用于轻量级原型工业晶圆台。所提出的方法利用模态建模框架，并将最近开发的强大的线性时不变（LTI）识别工具与基于样条的模态插值方法相结合来估计空间系统行为。晶圆级应用的实验结果证实了所提出的方法对于识别复杂的位置相关机械系统的适用性及其运动控制性能改进的潜力。