Light-matter interaction in optomechanical systems is the foundation for ultra-sensitive detection schemes as well as the generation of phononic and photonic quantum states. Electromechanical systems realize this optomechanical interaction in the microwave regime. In this context, capacitive coupling arrangements demonstrated interaction rates of up to 280 Hz. Complementary, early proposals and experiments suggest that inductive coupling schemes are tunable and have the potential to reach the single-photon strong-coupling regime. Here, we follow the latter approach by integrating a partly suspended superconducting quantum interference device (SQUID) into a microwave resonator. The mechanical displacement translates into a time varying flux in the SQUID loop, thereby providing an inductive electromechanical coupling. We demonstrate a sideband-resolved electromechanical system with a tunable vacuum coupling rate of up to 1.62 kHz, realizing sub-aN Hz^−1/2 force sensitivities. The presented inductive coupling scheme shows the high potential of SQUID-based electromechanics for targeting the full wealth of the intrinsically nonlinear optomechanics Hamiltonian.

光学机械系统中的物质相互作用是超灵敏检测方案以及声子和光子量子态生成的基础。机电系统在微波状态下实现了这种光机械相互作用。在这种情况下，电容耦合装置的相互作用速率高达280 Hz。补充，早期的建议和实验表明，电感耦合方案是可调的，并且有可能达到单光子强耦合体系。在这里，我们通过将部分悬浮的超导量子干涉装置（SQUID）集成到微波谐振器中来遵循后一种方法。机械位移在SQUID回路中转化为随时间变化的磁通，从而提供感应式机电耦合。^−1/2力敏感度。所提出的电感耦合方案显示出基于SQUID的机电技术的巨大潜力，可以针对全部固有的非线性光力学哈密顿量。