This paper discusses an integrated hybrid MEMS hydrogen sensor that detects hydrogen in the range from 5 ppm to 100 vol%. The sensor is a single chip comprising both capacitive and thermal conductivity hydrogen sensors that can be fabricated simultaneously using the same process flow. The capacitive sensor detected hydrogen at concentrations as low as 5 ppm without a heater. The thermal conductivity sensor measured high hydrogen concentrations and had a low power consumption of several tens of milliwatts. The integrated hybrid MEMS hydrogen sensor showed a high gas selectivity.

中文翻译：

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具有高灵敏度和高动态范围的集成式混合MEMS氢传感器

本文讨论了一种集成式混合MEMS氢传感器，该传感器可检测5 ppm至100 vol％的氢。该传感器是一个单芯片，既包含电容式氢传感器又包含导热氢传感器，可以使用相同的工艺流程同时制造。电容式传感器在没有加热器的情况下检测到浓度低至5 ppm的氢气。热导率传感器测得的氢浓度很高，功耗低至几十毫瓦。集成的混合MEMS氢传感器显示出高的气体选择性。